Incharge Email
sbedanta@niser.ac.in
Specification
It has 3 RF and 2 DC sputtering target along with 4 pocket e-beam and two port thermal boat facilities. One DC Nanogen sputtering for direct nano-particle synthesis. The base pressure is ~1x10-10 mbar. This system is dedicated for oxide and magnetic materials deposition
Add. Info
Mantis Deposition Ltd. UK