Modular Thin Film deposition system
It is a small UHV chamber with base pressure of ~5x10-7 mbar with 4 pocket e-beam and two port thermal boat facilities. This system is dedicated for metal deposition.
It is a small UHV chamber with base pressure of ~5x10-7 mbar with 4 pocket e-beam and two port thermal boat facilities. This system is dedicated for metal deposition.